THE APPLICATION OF RAPID THERMAL ANNEALING TO REDUCE LEAKAGE CURRENT OF TA2O5

THE APPLICATION OF RAPID THERMAL ANNEALING TO REDUCE LEAKAGE CURRENT OF TA2O5

Master's

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Bibliographic Details
Main Author: QIAN PENGWEI
Other Authors: ELECTRICAL ENGINEERING
Format: Theses and Dissertations
Published: 2020
Subjects:
Ta2O5
interfacial SiOx
RTA
defect states
leakage current
ZBTSC
Online Access:https://scholarbank.nus.edu.sg/handle/10635/180038
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Institution: National University of Singapore
id sg-nus-scholar.10635-180038
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spelling sg-nus-scholar.10635-1800382020-11-19T13:57:18Z THE APPLICATION OF RAPID THERMAL ANNEALING TO REDUCE LEAKAGE CURRENT OF TA2O5 QIAN PENGWEI ELECTRICAL ENGINEERING LAU WAI SHING LI MINGFU Ta2O5 interfacial SiOx RTA defect states leakage current ZBTSC Master's MASTER OF ENGINEERING 2020-10-26T06:33:01Z 2020-10-26T06:33:01Z 1999 Thesis QIAN PENGWEI (1999). THE APPLICATION OF RAPID THERMAL ANNEALING TO REDUCE LEAKAGE CURRENT OF TA2O5. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/180038 CCK BATCHLOAD 20201023
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Ta2O5
interfacial SiOx
RTA
defect states
leakage current
ZBTSC
spellingShingle Ta2O5
interfacial SiOx
RTA
defect states
leakage current
ZBTSC
QIAN PENGWEI
THE APPLICATION OF RAPID THERMAL ANNEALING TO REDUCE LEAKAGE CURRENT OF TA2O5
description Master's
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
QIAN PENGWEI
format Theses and Dissertations
author QIAN PENGWEI
author_sort QIAN PENGWEI
title THE APPLICATION OF RAPID THERMAL ANNEALING TO REDUCE LEAKAGE CURRENT OF TA2O5
title_short THE APPLICATION OF RAPID THERMAL ANNEALING TO REDUCE LEAKAGE CURRENT OF TA2O5
title_full THE APPLICATION OF RAPID THERMAL ANNEALING TO REDUCE LEAKAGE CURRENT OF TA2O5
title_fullStr THE APPLICATION OF RAPID THERMAL ANNEALING TO REDUCE LEAKAGE CURRENT OF TA2O5
title_full_unstemmed THE APPLICATION OF RAPID THERMAL ANNEALING TO REDUCE LEAKAGE CURRENT OF TA2O5
title_sort application of rapid thermal annealing to reduce leakage current of ta2o5
publishDate 2020
url https://scholarbank.nus.edu.sg/handle/10635/180038
_version_ 1686109088204718080

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