A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation

A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation

10.1063/1.4980022

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書目詳細資料
Main Authors:	Wang, D, Huang, Y, Liu, B, Zhu, L, Lam, J, Mai, Z
其他作者:	ELECTRICAL AND COMPUTER ENGINEERING
格式:	Article
出版:	American Institute of Physics 2020
主題:	Efficiency Grinding (machining) Ion beams Milling (machining) Polishing Scanning electron microscopy Transmission electron microscopy Focused ion beam milling Grinding and polishing Membrane thickness Nano-meter scale Sample preparation Sample preparation techniques TEM sample preparation Thinning methods Fixtures (tooling)
在線閱讀:	https://scholarbank.nus.edu.sg/handle/10635/183538
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	National University of Singapore

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