Considerations for the nano aperture ion source: Geometrical design and electrical control

Considerations for the nano aperture ion source: Geometrical design and electrical control

10.1063/1.5128657

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Bibliographic Details
Main Authors:	Jeroen A. van Kan, Rudy Pang, Tanmoy Basu, Yanxin Dou, Gokul, Nicolas Tarino, Jack Tregidga, Sangita Chaki Roy, Huei Ming Tan
Other Authors:	CENTRE FOR ADVANCED 2D MATERIALS
Format:	Article
Published:	AIP Publishing 2021
Subjects:	Lenses Focused ion beam Chemical vapor deposition Electronic control systems Physics of gases Tensile stress Microcontroller Ion sources Optical aberrations Electron beams
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/188023
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Institution:	National University of Singapore

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Summary:	10.1063/1.5128657