Considerations for the nano aperture ion source: Geometrical design and electrical control

• Main Authors: Jeroen A. van Kan, Rudy Pang, Tanmoy Basu, Yanxin Dou, Gokul, Nicolas Tarino, Jack Tregidga, Sangita Chaki Roy, Huei Ming Tan
• Other Authors: CENTRE FOR ADVANCED 2D MATERIALS
• Format: Article
• Published: AIP Publishing 2021
• Subjects: Lenses; Focused ion beam; Chemical vapor deposition; Electronic control systems; Physics of gases; Tensile stress; Microcontroller; Ion sources; Optical aberrations; Electron beams
• Online Access: https://scholarbank.nus.edu.sg/handle/10635/188023
• Institution: National University of Singapore

10.1063/1.5128657