Considerations for the nano aperture ion source: Geometrical design and electrical control

10.1063/1.5128657

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Bibliographic Details
Main Authors:	Jeroen A. van Kan, Rudy Pang, Tanmoy Basu, Yanxin Dou, Gokul, Nicolas Tarino, Jack Tregidga, Sangita Chaki Roy, Huei Ming Tan
Other Authors:	CENTRE FOR ADVANCED 2D MATERIALS
Format:	Article
Published:	AIP Publishing 2021
Subjects:	Lenses Focused ion beam Chemical vapor deposition Electronic control systems Physics of gases Tensile stress Microcontroller Ion sources Optical aberrations Electron beams
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/188023
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-188023
record_format	dspace
spelling	sg-nus-scholar.10635-1880232023-09-05T22:06:45Z Considerations for the nano aperture ion source: Geometrical design and electrical control Jeroen A. van Kan Rudy Pang Tanmoy Basu Yanxin Dou Gokul Nicolas Tarino Jack Tregidga Sangita Chaki Roy Huei Ming Tan CENTRE FOR ADVANCED 2D MATERIALS DEPT OF ELECTRICAL & COMPUTER ENGG DEPT OF PHYSICS Lenses Focused ion beam Chemical vapor deposition Electronic control systems Physics of gases Tensile stress Microcontroller Ion sources Optical aberrations Electron beams 10.1063/1.5128657 Review of Scientific Instruments 91 1 2021-03-31T07:56:43Z 2021-03-31T07:56:43Z 2020-01-10 Article Jeroen A. van Kan, Rudy Pang, Tanmoy Basu, Yanxin Dou, Gokul, Nicolas Tarino, Jack Tregidga, Sangita Chaki Roy, Huei Ming Tan (2020-01-10). Considerations for the nano aperture ion source: Geometrical design and electrical control. Review of Scientific Instruments 91 (1). ScholarBank@NUS Repository. https://doi.org/10.1063/1.5128657 10897623 https://scholarbank.nus.edu.sg/handle/10635/188023 AIP Publishing
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Lenses Focused ion beam Chemical vapor deposition Electronic control systems Physics of gases Tensile stress Microcontroller Ion sources Optical aberrations Electron beams
spellingShingle	Lenses Focused ion beam Chemical vapor deposition Electronic control systems Physics of gases Tensile stress Microcontroller Ion sources Optical aberrations Electron beams Jeroen A. van Kan Rudy Pang Tanmoy Basu Yanxin Dou Gokul Nicolas Tarino Jack Tregidga Sangita Chaki Roy Huei Ming Tan Considerations for the nano aperture ion source: Geometrical design and electrical control
description	10.1063/1.5128657
author2	CENTRE FOR ADVANCED 2D MATERIALS
author_facet	CENTRE FOR ADVANCED 2D MATERIALS Jeroen A. van Kan Rudy Pang Tanmoy Basu Yanxin Dou Gokul Nicolas Tarino Jack Tregidga Sangita Chaki Roy Huei Ming Tan
format	Article
author	Jeroen A. van Kan Rudy Pang Tanmoy Basu Yanxin Dou Gokul Nicolas Tarino Jack Tregidga Sangita Chaki Roy Huei Ming Tan
author_sort	Jeroen A. van Kan
title	Considerations for the nano aperture ion source: Geometrical design and electrical control
title_short	Considerations for the nano aperture ion source: Geometrical design and electrical control
title_full	Considerations for the nano aperture ion source: Geometrical design and electrical control
title_fullStr	Considerations for the nano aperture ion source: Geometrical design and electrical control
title_full_unstemmed	Considerations for the nano aperture ion source: Geometrical design and electrical control
title_sort	considerations for the nano aperture ion source: geometrical design and electrical control
publisher	AIP Publishing
publishDate	2021
url	https://scholarbank.nus.edu.sg/handle/10635/188023
_version_	1779153273644646400

Considerations for the nano aperture ion source: Geometrical design and electrical control

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