Defect Engineering in the formation of Ultra-shallow junctions for advanced nano-metal-oxide-semiconductor technology
Ph.D
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2011
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/19033 |
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sg-nus-scholar.10635-190332017-10-21T09:12:17Z Defect Engineering in the formation of Ultra-shallow junctions for advanced nano-metal-oxide-semiconductor technology YEONG SAI HOOI CHEMICAL & BIOMOLECULAR ENGINEERING SRINIVASAN, MADAPUSI P AKKIPEDDI RAMAM Ultra-shallow junctions (USJs), defects, dopants, co-implantation, annealing, surface. Ph.D DOCTOR OF PHILOSOPHY 2011-01-31T18:00:27Z 2011-01-31T18:00:27Z 2010-01-19 Thesis YEONG SAI HOOI (2010-01-19). Defect Engineering in the formation of Ultra-shallow junctions for advanced nano-metal-oxide-semiconductor technology. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/19033 NOT_IN_WOS en |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| language |
English |
| topic |
Ultra-shallow junctions (USJs), defects, dopants, co-implantation, annealing, surface. |
| spellingShingle |
Ultra-shallow junctions (USJs), defects, dopants, co-implantation, annealing, surface. YEONG SAI HOOI Defect Engineering in the formation of Ultra-shallow junctions for advanced nano-metal-oxide-semiconductor technology |
| description |
Ph.D |
| author2 |
CHEMICAL & BIOMOLECULAR ENGINEERING |
| author_facet |
CHEMICAL & BIOMOLECULAR ENGINEERING YEONG SAI HOOI |
| format |
Theses and Dissertations |
| author |
YEONG SAI HOOI |
| author_sort |
YEONG SAI HOOI |
| title |
Defect Engineering in the formation of Ultra-shallow junctions for advanced nano-metal-oxide-semiconductor technology |
| title_short |
Defect Engineering in the formation of Ultra-shallow junctions for advanced nano-metal-oxide-semiconductor technology |
| title_full |
Defect Engineering in the formation of Ultra-shallow junctions for advanced nano-metal-oxide-semiconductor technology |
| title_fullStr |
Defect Engineering in the formation of Ultra-shallow junctions for advanced nano-metal-oxide-semiconductor technology |
| title_full_unstemmed |
Defect Engineering in the formation of Ultra-shallow junctions for advanced nano-metal-oxide-semiconductor technology |
| title_sort |
defect engineering in the formation of ultra-shallow junctions for advanced nano-metal-oxide-semiconductor technology |
| publishDate |
2011 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/19033 |
| _version_ |
1681079587184836608 |