Defect Engineering in the formation of Ultra-shallow junctions for advanced nano-metal-oxide-semiconductor technology
Ph.D
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Main Author: | YEONG SAI HOOI |
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Other Authors: | CHEMICAL & BIOMOLECULAR ENGINEERING |
Format: | Theses and Dissertations |
Language: | English |
Published: |
2011
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/19033 |
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Institution: | National University of Singapore |
Language: | English |
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