Resolution Enhancement Techniques (RET) for Immersion Lithography

Ph.D

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Bibliographic Details
Main Author:	LING MOH LUNG
Other Authors:	MECHANICAL ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2011
Subjects:	Immersion lithography, Resolution enhancement techniques, Off axis illumination, Optical proximity correction, Source mask optimization, Diffraction
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/20983
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-20983
record_format	dspace
spelling	sg-nus-scholar.10635-209832017-10-21T08:26:29Z Resolution Enhancement Techniques (RET) for Immersion Lithography LING MOH LUNG MECHANICAL ENGINEERING TAY CHO JUI QUAN CHENGGEN Immersion lithography, Resolution enhancement techniques, Off axis illumination, Optical proximity correction, Source mask optimization, Diffraction Ph.D DOCTOR OF PHILOSOPHY 2011-03-31T18:01:28Z 2011-03-31T18:01:28Z 2010-08-14 Thesis LING MOH LUNG (2010-08-14). Resolution Enhancement Techniques (RET) for Immersion Lithography. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/20983 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Immersion lithography, Resolution enhancement techniques, Off axis illumination, Optical proximity correction, Source mask optimization, Diffraction
spellingShingle	Immersion lithography, Resolution enhancement techniques, Off axis illumination, Optical proximity correction, Source mask optimization, Diffraction LING MOH LUNG Resolution Enhancement Techniques (RET) for Immersion Lithography
description	Ph.D
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING LING MOH LUNG
format	Theses and Dissertations
author	LING MOH LUNG
author_sort	LING MOH LUNG
title	Resolution Enhancement Techniques (RET) for Immersion Lithography
title_short	Resolution Enhancement Techniques (RET) for Immersion Lithography
title_full	Resolution Enhancement Techniques (RET) for Immersion Lithography
title_fullStr	Resolution Enhancement Techniques (RET) for Immersion Lithography
title_full_unstemmed	Resolution Enhancement Techniques (RET) for Immersion Lithography
title_sort	resolution enhancement techniques (ret) for immersion lithography
publishDate	2011
url	http://scholarbank.nus.edu.sg/handle/10635/20983
_version_	1681079793859166208

Resolution Enhancement Techniques (RET) for Immersion Lithography

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