Anneal-Free HZO-Based Ferroelectric Field-Effect Transistor for Back-End-of- Line-Compatible Monolithic 3D Integration
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Main Authors: | , , , , , , |
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Other Authors: | |
Format: | Conference or Workshop Item |
Published: |
2022
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Online Access: | https://scholarbank.nus.edu.sg/handle/10635/224456 |
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Institution: | National University of Singapore |