Anneal-Free HZO-Based Ferroelectric Field-Effect Transistor for Back-End-of- Line-Compatible Monolithic 3D Integration

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Main Authors:	Tsai Shih-Hao, Chun-Kuei Chen, WANG XINGHUA, UMESH CHAND, SONU DEVI, Evgeny Zamburg, THEAN VOON YEW, AARON
Other Authors:	DEAN'S OFFICE (ENGINEERING)
Format:	Conference or Workshop Item
Published:	2022
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/224456
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-224456
record_format	dspace
spelling	sg-nus-scholar.10635-2244562024-04-16T11:14:18Z Anneal-Free HZO-Based Ferroelectric Field-Effect Transistor for Back-End-of- Line-Compatible Monolithic 3D Integration Tsai Shih-Hao Chun-Kuei Chen WANG XINGHUA UMESH CHAND SONU DEVI Evgeny Zamburg THEAN VOON YEW, AARON DEAN'S OFFICE (ENGINEERING) ELECTRICAL AND COMPUTER ENGINEERING 2022-04-28T06:19:12Z 2022-04-28T06:19:12Z 2022-04-20 Conference Paper Tsai Shih-Hao, Chun-Kuei Chen, WANG XINGHUA, UMESH CHAND, SONU DEVI, Evgeny Zamburg, THEAN VOON YEW, AARON (2022-04-20). Anneal-Free HZO-Based Ferroelectric Field-Effect Transistor for Back-End-of- Line-Compatible Monolithic 3D Integration. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/224456
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
author2	DEAN'S OFFICE (ENGINEERING)
author_facet	DEAN'S OFFICE (ENGINEERING) Tsai Shih-Hao Chun-Kuei Chen WANG XINGHUA UMESH CHAND SONU DEVI Evgeny Zamburg THEAN VOON YEW, AARON
format	Conference or Workshop Item
author	Tsai Shih-Hao Chun-Kuei Chen WANG XINGHUA UMESH CHAND SONU DEVI Evgeny Zamburg THEAN VOON YEW, AARON
spellingShingle	Tsai Shih-Hao Chun-Kuei Chen WANG XINGHUA UMESH CHAND SONU DEVI Evgeny Zamburg THEAN VOON YEW, AARON Anneal-Free HZO-Based Ferroelectric Field-Effect Transistor for Back-End-of- Line-Compatible Monolithic 3D Integration
author_sort	Tsai Shih-Hao
title	Anneal-Free HZO-Based Ferroelectric Field-Effect Transistor for Back-End-of- Line-Compatible Monolithic 3D Integration
title_short	Anneal-Free HZO-Based Ferroelectric Field-Effect Transistor for Back-End-of- Line-Compatible Monolithic 3D Integration
title_full	Anneal-Free HZO-Based Ferroelectric Field-Effect Transistor for Back-End-of- Line-Compatible Monolithic 3D Integration
title_fullStr	Anneal-Free HZO-Based Ferroelectric Field-Effect Transistor for Back-End-of- Line-Compatible Monolithic 3D Integration
title_full_unstemmed	Anneal-Free HZO-Based Ferroelectric Field-Effect Transistor for Back-End-of- Line-Compatible Monolithic 3D Integration
title_sort	anneal-free hzo-based ferroelectric field-effect transistor for back-end-of- line-compatible monolithic 3d integration
publishDate	2022
url	https://scholarbank.nus.edu.sg/handle/10635/224456
_version_	1800915384239390720

Anneal-Free HZO-Based Ferroelectric Field-Effect Transistor for Back-End-of- Line-Compatible Monolithic 3D Integration

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