Anneal-Free HZO-Based Ferroelectric Field-Effect Transistor for Back-End-of- Line-Compatible Monolithic 3D Integration

• Main Authors: Tsai Shih-Hao, Chun-Kuei Chen, WANG XINGHUA, UMESH CHAND, SONU DEVI, Evgeny Zamburg, THEAN VOON YEW, AARON
• Other Authors: DEAN'S OFFICE (ENGINEERING)
• Format: Conference or Workshop Item
• Published: 2022
• Online Access: https://scholarbank.nus.edu.sg/handle/10635/224456
• Institution: National University of Singapore