Extremely- Scaled Channel Thickness ZnO FET with High Mobility 86 cm2/V-s, Low SS of 83mV/dec and Low Thermal Budget Process (<300°C)

10.1109/EDTM53872.2022.9798261

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Main Authors: Umesh Chand, Chen Chun-Kuei, Manohar Lal, Sonu Hooda, Hasita Veluri, Zihang Fang, Shih-Hao Tsai, Aaron Voon-Yew Thean
Other Authors: DEAN'S OFFICE (ENGINEERING)
Format: Conference or Workshop Item
Language:English
Published: IEEE 2022
Online Access:https://scholarbank.nus.edu.sg/handle/10635/232257
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Institution: National University of Singapore
Language: English
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spelling sg-nus-scholar.10635-2322572024-04-16T11:52:45Z Extremely- Scaled Channel Thickness ZnO FET with High Mobility 86 cm2/V-s, Low SS of 83mV/dec and Low Thermal Budget Process (<300°C) Umesh Chand Chen Chun-Kuei Manohar Lal Sonu Hooda Hasita Veluri Zihang Fang Shih-Hao Tsai Aaron Voon-Yew Thean DEAN'S OFFICE (ENGINEERING) ELECTRICAL AND COMPUTER ENGINEERING 10.1109/EDTM53872.2022.9798261 2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) 2022-10-12T01:00:01Z 2022-10-12T01:00:01Z 2022-03-06 Conference Paper Umesh Chand, Chen Chun-Kuei, Manohar Lal, Sonu Hooda, Hasita Veluri, Zihang Fang, Shih-Hao Tsai, Aaron Voon-Yew Thean (2022-03-06). Extremely- Scaled Channel Thickness ZnO FET with High Mobility 86 cm2/V-s, Low SS of 83mV/dec and Low Thermal Budget Process (<300°C). 2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM). ScholarBank@NUS Repository. https://doi.org/10.1109/EDTM53872.2022.9798261 978-1-6654-2179-9 https://scholarbank.nus.edu.sg/handle/10635/232257 en CC0 1.0 Universal http://creativecommons.org/publicdomain/zero/1.0/ IEEE
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
language English
description 10.1109/EDTM53872.2022.9798261
author2 DEAN'S OFFICE (ENGINEERING)
author_facet DEAN'S OFFICE (ENGINEERING)
Umesh Chand
Chen Chun-Kuei
Manohar Lal
Sonu Hooda
Hasita Veluri
Zihang Fang
Shih-Hao Tsai
Aaron Voon-Yew Thean
format Conference or Workshop Item
author Umesh Chand
Chen Chun-Kuei
Manohar Lal
Sonu Hooda
Hasita Veluri
Zihang Fang
Shih-Hao Tsai
Aaron Voon-Yew Thean
spellingShingle Umesh Chand
Chen Chun-Kuei
Manohar Lal
Sonu Hooda
Hasita Veluri
Zihang Fang
Shih-Hao Tsai
Aaron Voon-Yew Thean
Extremely- Scaled Channel Thickness ZnO FET with High Mobility 86 cm2/V-s, Low SS of 83mV/dec and Low Thermal Budget Process (<300°C)
author_sort Umesh Chand
title Extremely- Scaled Channel Thickness ZnO FET with High Mobility 86 cm2/V-s, Low SS of 83mV/dec and Low Thermal Budget Process (<300°C)
title_short Extremely- Scaled Channel Thickness ZnO FET with High Mobility 86 cm2/V-s, Low SS of 83mV/dec and Low Thermal Budget Process (<300°C)
title_full Extremely- Scaled Channel Thickness ZnO FET with High Mobility 86 cm2/V-s, Low SS of 83mV/dec and Low Thermal Budget Process (<300°C)
title_fullStr Extremely- Scaled Channel Thickness ZnO FET with High Mobility 86 cm2/V-s, Low SS of 83mV/dec and Low Thermal Budget Process (<300°C)
title_full_unstemmed Extremely- Scaled Channel Thickness ZnO FET with High Mobility 86 cm2/V-s, Low SS of 83mV/dec and Low Thermal Budget Process (<300°C)
title_sort extremely- scaled channel thickness zno fet with high mobility 86 cm2/v-s, low ss of 83mv/dec and low thermal budget process (<300°c)
publisher IEEE
publishDate 2022
url https://scholarbank.nus.edu.sg/handle/10635/232257
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