Fabrication of ultra-shallow junctions and advanced gate stacks for ULSI technologies using laser thermal processing

Ph.D

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Bibliographic Details
Main Author:	CHONG YUNG FU
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2011
Subjects:	crystal damage, gate oxide, laser thermal processing, poly-depletion, step-like profile, ultra-shallow junctions
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/27635
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-27635
record_format	dspace
spelling	sg-nus-scholar.10635-276352024-10-26T03:19:46Z Fabrication of ultra-shallow junctions and advanced gate stacks for ULSI technologies using laser thermal processing CHONG YUNG FU ELECTRICAL & COMPUTER ENGINEERING PEY KIN LEONG WEE THYE SHEN, ANDREW crystal damage, gate oxide, laser thermal processing, poly-depletion, step-like profile, ultra-shallow junctions Ph.D DOCTOR OF PHILOSOPHY 2011-10-12T18:00:27Z 2011-10-12T18:00:27Z 2003-11-11 Thesis CHONG YUNG FU (2003-11-11). Fabrication of ultra-shallow junctions and advanced gate stacks for ULSI technologies using laser thermal processing. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/27635 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	crystal damage, gate oxide, laser thermal processing, poly-depletion, step-like profile, ultra-shallow junctions
spellingShingle	crystal damage, gate oxide, laser thermal processing, poly-depletion, step-like profile, ultra-shallow junctions CHONG YUNG FU Fabrication of ultra-shallow junctions and advanced gate stacks for ULSI technologies using laser thermal processing
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING CHONG YUNG FU
format	Theses and Dissertations
author	CHONG YUNG FU
author_sort	CHONG YUNG FU
title	Fabrication of ultra-shallow junctions and advanced gate stacks for ULSI technologies using laser thermal processing
title_short	Fabrication of ultra-shallow junctions and advanced gate stacks for ULSI technologies using laser thermal processing
title_full	Fabrication of ultra-shallow junctions and advanced gate stacks for ULSI technologies using laser thermal processing
title_fullStr	Fabrication of ultra-shallow junctions and advanced gate stacks for ULSI technologies using laser thermal processing
title_full_unstemmed	Fabrication of ultra-shallow junctions and advanced gate stacks for ULSI technologies using laser thermal processing
title_sort	fabrication of ultra-shallow junctions and advanced gate stacks for ulsi technologies using laser thermal processing
publishDate	2011
url	http://scholarbank.nus.edu.sg/handle/10635/27635
_version_	1821194317893468160

Fabrication of ultra-shallow junctions and advanced gate stacks for ULSI technologies using laser thermal processing

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