Isolation process for surface micromachined sensors and actuators
US5930595
Saved in:
| Main Authors: | , , , , |
|---|---|
| Other Authors: | |
| Format: | Patent |
| Published: |
2012
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/32563 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| Summary: | US5930595 |
|---|