Isolation process for surface micromachined sensors and actuators

• Main Authors: SRIDHAR, UPPILI, JUN, LIU LIAN, DOW, FOO PANG, HONG, LO YONG, BO, MAIO YU
• Other Authors: INSTITUTE OF MICROELECTRONICS
• Format: Patent
• Published: 2012
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/32563
• Institution: National University of Singapore

US5930595