Isolation process for surface micromachined sensors and actuators

Isolation process for surface micromachined sensors and actuators

US5930595

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Main Authors: SRIDHAR, UPPILI, JUN, LIU LIAN, DOW, FOO PANG, HONG, LO YONG, BO, MAIO YU
Other Authors: INSTITUTE OF MICROELECTRONICS
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32563
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Institution: National University of Singapore
id sg-nus-scholar.10635-32563
record_format dspace
spelling sg-nus-scholar.10635-325632015-07-29T07:03:40Z Isolation process for surface micromachined sensors and actuators SRIDHAR, UPPILI JUN, LIU LIAN DOW, FOO PANG HONG, LO YONG BO, MAIO YU INSTITUTE OF MICROELECTRONICS INSTITUTE OF MICROELECTRONICS NATIONAL UNIVERSITY OF SINGAPORE US5930595 Granted Patent 2012-05-02T02:27:05Z 2012-05-02T02:27:05Z 1999-07-27 Patent SRIDHAR, UPPILI,JUN, LIU LIAN,DOW, FOO PANG,HONG, LO YONG,BO, MAIO YU (1999-07-27). Isolation process for surface micromachined sensors and actuators. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32563 NOT_IN_WOS PatSnap
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description US5930595
author2 INSTITUTE OF MICROELECTRONICS
author_facet INSTITUTE OF MICROELECTRONICS
SRIDHAR, UPPILI
JUN, LIU LIAN
DOW, FOO PANG
HONG, LO YONG
BO, MAIO YU
format Patent
author SRIDHAR, UPPILI
JUN, LIU LIAN
DOW, FOO PANG
HONG, LO YONG
BO, MAIO YU
spellingShingle SRIDHAR, UPPILI
JUN, LIU LIAN
DOW, FOO PANG
HONG, LO YONG
BO, MAIO YU
Isolation process for surface micromachined sensors and actuators
author_sort SRIDHAR, UPPILI
title Isolation process for surface micromachined sensors and actuators
title_short Isolation process for surface micromachined sensors and actuators
title_full Isolation process for surface micromachined sensors and actuators
title_fullStr Isolation process for surface micromachined sensors and actuators
title_full_unstemmed Isolation process for surface micromachined sensors and actuators
title_sort isolation process for surface micromachined sensors and actuators
publishDate 2012
url http://scholarbank.nus.edu.sg/handle/10635/32563
_version_ 1681081246336155648

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