Ultra-low sheet resistance metal/poly-si gate for deep sub-micron CMOS application

US6093628

Saved in:

Bibliographic Details
Main Authors:	LIM, CHONG WEE, PEY, KIN LEONG, SIAH, SOH YUN, LIM, ENG HWA, CHAN, LAP
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Patent
Published:	2012
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/32578
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-32578
record_format	dspace
spelling	sg-nus-scholar.10635-325782015-07-29T07:03:41Z Ultra-low sheet resistance metal/poly-si gate for deep sub-micron CMOS application LIM, CHONG WEE PEY, KIN LEONG SIAH, SOH YUN LIM, ENG HWA CHAN, LAP ELECTRICAL & COMPUTER ENGINEERING BIOLOGICAL SCIENCES CHARTERED SEMICONDUCTOR MANUFACTURING, LTD (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE US6093628 Granted Patent 2012-05-02T02:27:18Z 2012-05-02T02:27:18Z 2000-07-25 Patent LIM, CHONG WEE,PEY, KIN LEONG,SIAH, SOH YUN,LIM, ENG HWA,CHAN, LAP (2000-07-25). Ultra-low sheet resistance metal/poly-si gate for deep sub-micron CMOS application. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32578 NOT_IN_WOS PatSnap
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	US6093628
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING LIM, CHONG WEE PEY, KIN LEONG SIAH, SOH YUN LIM, ENG HWA CHAN, LAP
format	Patent
author	LIM, CHONG WEE PEY, KIN LEONG SIAH, SOH YUN LIM, ENG HWA CHAN, LAP
spellingShingle	LIM, CHONG WEE PEY, KIN LEONG SIAH, SOH YUN LIM, ENG HWA CHAN, LAP Ultra-low sheet resistance metal/poly-si gate for deep sub-micron CMOS application
author_sort	LIM, CHONG WEE
title	Ultra-low sheet resistance metal/poly-si gate for deep sub-micron CMOS application
title_short	Ultra-low sheet resistance metal/poly-si gate for deep sub-micron CMOS application
title_full	Ultra-low sheet resistance metal/poly-si gate for deep sub-micron CMOS application
title_fullStr	Ultra-low sheet resistance metal/poly-si gate for deep sub-micron CMOS application
title_full_unstemmed	Ultra-low sheet resistance metal/poly-si gate for deep sub-micron CMOS application
title_sort	ultra-low sheet resistance metal/poly-si gate for deep sub-micron cmos application
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/32578
_version_	1681081249044627456

Ultra-low sheet resistance metal/poly-si gate for deep sub-micron CMOS application

Similar Items