Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices

• Main Authors: HO, CHAW SING, LEE, YUAN PING, LAP, CHAN, LU, YONG FENG, KARUNASIRI, R.P.G.
• 其他作者: ELECTRICAL & COMPUTER ENGINEERING
• 格式: Patent
• 出版: 2012
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/32584

US6156654