Process flow for a performance enhanced MOSFET with self-aligned, recessed channel

• Main Authors: SNEELAL, SNEEDHARAN PILLAI, POH, FRANCIS, LEE, JAMES, SEE, ALEX, LAU, C. K., SAMUDRA, GANESH SHANKAR
• 其他作者: ELECTRICAL & COMPUTER ENGINEERING
• 格式: Patent
• 出版: 2012
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/32718

US7091092