Process flow for a performance enhanced MOSFET with self-aligned, recessed channel

US7091092

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Main Authors: SNEELAL, SNEEDHARAN PILLAI, POH, FRANCIS, LEE, JAMES, SEE, ALEX, LAU, C. K., SAMUDRA, GANESH SHANKAR
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32718
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Institution: National University of Singapore
id sg-nus-scholar.10635-32718
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spelling sg-nus-scholar.10635-327182024-11-13T12:47:04Z Process flow for a performance enhanced MOSFET with self-aligned, recessed channel SNEELAL, SNEEDHARAN PILLAI POH, FRANCIS LEE, JAMES SEE, ALEX LAU, C. K. SAMUDRA, GANESH SHANKAR ELECTRICAL & COMPUTER ENGINEERING PHYSICS CHARTERED SEMICONDUCTOR MANUFACTURING LTD. (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE US7091092 Granted Patent 2012-05-02T02:29:20Z 2012-05-02T02:29:20Z 2006-08-15 Patent SNEELAL, SNEEDHARAN PILLAI,POH, FRANCIS,LEE, JAMES,SEE, ALEX,LAU, C. K.,SAMUDRA, GANESH SHANKAR (2006-08-15). Process flow for a performance enhanced MOSFET with self-aligned, recessed channel. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32718 NOT_IN_WOS PatSnap
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description US7091092
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
SNEELAL, SNEEDHARAN PILLAI
POH, FRANCIS
LEE, JAMES
SEE, ALEX
LAU, C. K.
SAMUDRA, GANESH SHANKAR
format Patent
author SNEELAL, SNEEDHARAN PILLAI
POH, FRANCIS
LEE, JAMES
SEE, ALEX
LAU, C. K.
SAMUDRA, GANESH SHANKAR
spellingShingle SNEELAL, SNEEDHARAN PILLAI
POH, FRANCIS
LEE, JAMES
SEE, ALEX
LAU, C. K.
SAMUDRA, GANESH SHANKAR
Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
author_sort SNEELAL, SNEEDHARAN PILLAI
title Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
title_short Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
title_full Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
title_fullStr Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
title_full_unstemmed Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
title_sort process flow for a performance enhanced mosfet with self-aligned, recessed channel
publishDate 2012
url http://scholarbank.nus.edu.sg/handle/10635/32718
_version_ 1821215396705861632