Process flow for a performance enhanced MOSFET with self-aligned, recessed channel

US7091092

Saved in:

Bibliographic Details
Main Authors:	SNEELAL, SNEEDHARAN PILLAI, POH, FRANCIS, LEE, JAMES, SEE, ALEX, LAU, C. K., SAMUDRA, GANESH SHANKAR
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Patent
Published:	2012
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/32718
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-32718
record_format	dspace
spelling	sg-nus-scholar.10635-327182024-11-13T12:47:04Z Process flow for a performance enhanced MOSFET with self-aligned, recessed channel SNEELAL, SNEEDHARAN PILLAI POH, FRANCIS LEE, JAMES SEE, ALEX LAU, C. K. SAMUDRA, GANESH SHANKAR ELECTRICAL & COMPUTER ENGINEERING PHYSICS CHARTERED SEMICONDUCTOR MANUFACTURING LTD. (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE US7091092 Granted Patent 2012-05-02T02:29:20Z 2012-05-02T02:29:20Z 2006-08-15 Patent SNEELAL, SNEEDHARAN PILLAI,POH, FRANCIS,LEE, JAMES,SEE, ALEX,LAU, C. K.,SAMUDRA, GANESH SHANKAR (2006-08-15). Process flow for a performance enhanced MOSFET with self-aligned, recessed channel. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32718 NOT_IN_WOS PatSnap
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	US7091092
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING SNEELAL, SNEEDHARAN PILLAI POH, FRANCIS LEE, JAMES SEE, ALEX LAU, C. K. SAMUDRA, GANESH SHANKAR
format	Patent
author	SNEELAL, SNEEDHARAN PILLAI POH, FRANCIS LEE, JAMES SEE, ALEX LAU, C. K. SAMUDRA, GANESH SHANKAR
spellingShingle	SNEELAL, SNEEDHARAN PILLAI POH, FRANCIS LEE, JAMES SEE, ALEX LAU, C. K. SAMUDRA, GANESH SHANKAR Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
author_sort	SNEELAL, SNEEDHARAN PILLAI
title	Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
title_short	Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
title_full	Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
title_fullStr	Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
title_full_unstemmed	Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
title_sort	process flow for a performance enhanced mosfet with self-aligned, recessed channel
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/32718
_version_	1821215396705861632

Process flow for a performance enhanced MOSFET with self-aligned, recessed channel

Similar Items