Process flow for a performance enhanced MOSFET with self-aligned, recessed channel

US7091092

Saved in:

Bibliographic Details
Main Authors:	SNEELAL, SNEEDHARAN PILLAI, POH, FRANCIS, LEE, JAMES, SEE, ALEX, LAU, C. K., SAMUDRA, GANESH SHANKAR
Other Authors:	PHYSICS
Format:	Patent
Published:	2012
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/32718
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

Description
Summary:	US7091092

Similar Items