Self-Aligned Source and Drain Contact Engineering for High Mobility III-V Transistor

Self-Aligned Source and Drain Contact Engineering for High Mobility III-V Transistor

Ph.D

Saved in:
Bibliographic Details
Main Author: ZHANG XINGUI
Other Authors: NUS GRAD SCH FOR INTEGRATIVE SCI & ENGG
Format: Theses and Dissertations
Language:English
Published: 2013
Subjects:
Self-Aligned, S/D Contact, III-V transistors, FinFET, InGaAs
Online Access:http://scholarbank.nus.edu.sg/handle/10635/37469
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
Language: English
id sg-nus-scholar.10635-37469
record_format dspace
spelling sg-nus-scholar.10635-374692024-10-26T00:33:12Z Self-Aligned Source and Drain Contact Engineering for High Mobility III-V Transistor ZHANG XINGUI NUS GRAD SCH FOR INTEGRATIVE SCI & ENGG YEO YEE CHIA Self-Aligned, S/D Contact, III-V transistors, FinFET, InGaAs Ph.D DOCTOR OF PHILOSOPHY 2013-04-15T18:00:31Z 2013-04-15T18:00:31Z 2012-08-24 Thesis ZHANG XINGUI (2012-08-24). Self-Aligned Source and Drain Contact Engineering for High Mobility III-V Transistor. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/37469 NOT_IN_WOS en
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
language English
topic Self-Aligned, S/D Contact, III-V transistors, FinFET, InGaAs
spellingShingle Self-Aligned, S/D Contact, III-V transistors, FinFET, InGaAs
ZHANG XINGUI
Self-Aligned Source and Drain Contact Engineering for High Mobility III-V Transistor
description Ph.D
author2 NUS GRAD SCH FOR INTEGRATIVE SCI & ENGG
author_facet NUS GRAD SCH FOR INTEGRATIVE SCI & ENGG
ZHANG XINGUI
format Theses and Dissertations
author ZHANG XINGUI
author_sort ZHANG XINGUI
title Self-Aligned Source and Drain Contact Engineering for High Mobility III-V Transistor
title_short Self-Aligned Source and Drain Contact Engineering for High Mobility III-V Transistor
title_full Self-Aligned Source and Drain Contact Engineering for High Mobility III-V Transistor
title_fullStr Self-Aligned Source and Drain Contact Engineering for High Mobility III-V Transistor
title_full_unstemmed Self-Aligned Source and Drain Contact Engineering for High Mobility III-V Transistor
title_sort self-aligned source and drain contact engineering for high mobility iii-v transistor
publishDate 2013
url http://scholarbank.nus.edu.sg/handle/10635/37469
_version_ 1821187792125820928

Similar Items