Sub-micron surface patterning by laser irradiation through microlens arrays

Sub-micron surface patterning by laser irradiation through microlens arrays

10.1016/j.jmatprotec.2007.04.088

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Bibliographic Details
Main Authors: Lim, C.S., Hong, M.H., Lin, Y., Chen, G.X., Senthil Kumar, A., Rahman, M., Tan, L.S., Fuh, J.Y.H., Lim, G.C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Femtosecond laser
Microlens arrays
Reactive ion etching (RIE)
Surface patterning
Online Access:http://scholarbank.nus.edu.sg/handle/10635/51050
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Institution: National University of Singapore
Description
Summary:10.1016/j.jmatprotec.2007.04.088

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