Sub-micron surface patterning by laser irradiation through microlens arrays

10.1016/j.jmatprotec.2007.04.088

Saved in:

Bibliographic Details
Main Authors:	Lim, C.S., Hong, M.H., Lin, Y., Chen, G.X., Senthil Kumar, A., Rahman, M., Tan, L.S., Fuh, J.Y.H., Lim, G.C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Femtosecond laser Microlens arrays Reactive ion etching (RIE) Surface patterning
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/51050
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-51050
record_format	dspace
spelling	sg-nus-scholar.10635-510502023-10-26T21:27:58Z Sub-micron surface patterning by laser irradiation through microlens arrays Lim, C.S. Hong, M.H. Lin, Y. Chen, G.X. Senthil Kumar, A. Rahman, M. Tan, L.S. Fuh, J.Y.H. Lim, G.C. ELECTRICAL & COMPUTER ENGINEERING MECHANICAL ENGINEERING NUS NANOSCIENCE & NANOTECH INITIATIVE Femtosecond laser Microlens arrays Reactive ion etching (RIE) Surface patterning 10.1016/j.jmatprotec.2007.04.088 Journal of Materials Processing Technology 192-193 328-333 JMPTE 2014-04-24T07:25:02Z 2014-04-24T07:25:02Z 2007-10-01 Article Lim, C.S., Hong, M.H., Lin, Y., Chen, G.X., Senthil Kumar, A., Rahman, M., Tan, L.S., Fuh, J.Y.H., Lim, G.C. (2007-10-01). Sub-micron surface patterning by laser irradiation through microlens arrays. Journal of Materials Processing Technology 192-193 : 328-333. ScholarBank@NUS Repository. https://doi.org/10.1016/j.jmatprotec.2007.04.088 09240136 http://scholarbank.nus.edu.sg/handle/10635/51050 000249314100051 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Femtosecond laser Microlens arrays Reactive ion etching (RIE) Surface patterning
spellingShingle	Femtosecond laser Microlens arrays Reactive ion etching (RIE) Surface patterning Lim, C.S. Hong, M.H. Lin, Y. Chen, G.X. Senthil Kumar, A. Rahman, M. Tan, L.S. Fuh, J.Y.H. Lim, G.C. Sub-micron surface patterning by laser irradiation through microlens arrays
description	10.1016/j.jmatprotec.2007.04.088
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lim, C.S. Hong, M.H. Lin, Y. Chen, G.X. Senthil Kumar, A. Rahman, M. Tan, L.S. Fuh, J.Y.H. Lim, G.C.
format	Article
author	Lim, C.S. Hong, M.H. Lin, Y. Chen, G.X. Senthil Kumar, A. Rahman, M. Tan, L.S. Fuh, J.Y.H. Lim, G.C.
author_sort	Lim, C.S.
title	Sub-micron surface patterning by laser irradiation through microlens arrays
title_short	Sub-micron surface patterning by laser irradiation through microlens arrays
title_full	Sub-micron surface patterning by laser irradiation through microlens arrays
title_fullStr	Sub-micron surface patterning by laser irradiation through microlens arrays
title_full_unstemmed	Sub-micron surface patterning by laser irradiation through microlens arrays
title_sort	sub-micron surface patterning by laser irradiation through microlens arrays
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/51050
_version_	1781411653981569024

Sub-micron surface patterning by laser irradiation through microlens arrays

Similar Items