Sub-micron surface patterning by laser irradiation through microlens arrays

• Main Authors: Lim, C.S., Hong, M.H., Lin, Y., Chen, G.X., Senthil Kumar, A., Rahman, M., Tan, L.S., Fuh, J.Y.H., Lim, G.C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Femtosecond laser; Microlens arrays; Reactive ion etching (RIE); Surface patterning
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/51050
• Institution: National University of Singapore

10.1016/j.jmatprotec.2007.04.088