Comprehensive modeling of ion-implant amorphization in silicon

10.1016/j.mseb.2005.08.026

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Bibliographic Details
Main Authors:	Mok, K.R.C., Jaraiz, M., Martin-Bragado, I., Rubio, J.E., Castrillo, P., Pinacho, R., Srinivasan, M.P., Benistant, F.
Other Authors:	CHEMICAL & BIOMOLECULAR ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Amorphization Amorphous pockets Ion-implant simulation
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/51830
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-51830
record_format	dspace
spelling	sg-nus-scholar.10635-518302023-10-30T21:54:17Z Comprehensive modeling of ion-implant amorphization in silicon Mok, K.R.C. Jaraiz, M. Martin-Bragado, I. Rubio, J.E. Castrillo, P. Pinacho, R. Srinivasan, M.P. Benistant, F. CHEMICAL & BIOMOLECULAR ENGINEERING Amorphization Amorphous pockets Ion-implant simulation 10.1016/j.mseb.2005.08.026 Materials Science and Engineering B: Solid-State Materials for Advanced Technology 124-125 SUPPL. 383-385 MSBTE 2014-04-25T09:05:45Z 2014-04-25T09:05:45Z 2005-12-05 Conference Paper Mok, K.R.C., Jaraiz, M., Martin-Bragado, I., Rubio, J.E., Castrillo, P., Pinacho, R., Srinivasan, M.P., Benistant, F. (2005-12-05). Comprehensive modeling of ion-implant amorphization in silicon. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 124-125 (SUPPL.) : 383-385. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mseb.2005.08.026 09215107 http://scholarbank.nus.edu.sg/handle/10635/51830 000233895800078 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Amorphization Amorphous pockets Ion-implant simulation
spellingShingle	Amorphization Amorphous pockets Ion-implant simulation Mok, K.R.C. Jaraiz, M. Martin-Bragado, I. Rubio, J.E. Castrillo, P. Pinacho, R. Srinivasan, M.P. Benistant, F. Comprehensive modeling of ion-implant amorphization in silicon
description	10.1016/j.mseb.2005.08.026
author2	CHEMICAL & BIOMOLECULAR ENGINEERING
author_facet	CHEMICAL & BIOMOLECULAR ENGINEERING Mok, K.R.C. Jaraiz, M. Martin-Bragado, I. Rubio, J.E. Castrillo, P. Pinacho, R. Srinivasan, M.P. Benistant, F.
format	Conference or Workshop Item
author	Mok, K.R.C. Jaraiz, M. Martin-Bragado, I. Rubio, J.E. Castrillo, P. Pinacho, R. Srinivasan, M.P. Benistant, F.
author_sort	Mok, K.R.C.
title	Comprehensive modeling of ion-implant amorphization in silicon
title_short	Comprehensive modeling of ion-implant amorphization in silicon
title_full	Comprehensive modeling of ion-implant amorphization in silicon
title_fullStr	Comprehensive modeling of ion-implant amorphization in silicon
title_full_unstemmed	Comprehensive modeling of ion-implant amorphization in silicon
title_sort	comprehensive modeling of ion-implant amorphization in silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/51830
_version_	1781411730603114496

Comprehensive modeling of ion-implant amorphization in silicon

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