Comprehensive modeling of ion-implant amorphization in silicon
10.1016/j.mseb.2005.08.026
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Main Authors: | Mok, K.R.C., Jaraiz, M., Martin-Bragado, I., Rubio, J.E., Castrillo, P., Pinacho, R., Srinivasan, M.P., Benistant, F. |
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Other Authors: | CHEMICAL & BIOMOLECULAR ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/51830 |
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Institution: | National University of Singapore |
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