Comprehensive model of damage accumulation in silicon

Comprehensive model of damage accumulation in silicon

10.1063/1.2829815

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Bibliographic Details
Main Authors: Mok, K.R.C., Benistant, F., Jaraiz, M., Rubio, J.E., Castrillo, P., Pinacho, R., Srinivasan, M.P.
Other Authors: CHEMICAL & BIOMOLECULAR ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/63622
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/63622

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