Comprehensive model of damage accumulation in silicon

Comprehensive model of damage accumulation in silicon

10.1063/1.2829815

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Bibliographic Details
Main Authors:	Mok, K.R.C., Benistant, F., Jaraiz, M., Rubio, J.E., Castrillo, P., Pinacho, R., Srinivasan, M.P.
Other Authors:	CHEMICAL & BIOMOLECULAR ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/63622
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Institution:	National University of Singapore

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