A dual-silicon-nanowires based U-shape nanoelectromechanical switch with low pull-in voltage
10.1063/1.3693382
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Main Authors: | Qian, Y., Lou, L., Julius Tsai, M., Lee, C. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/54101 |
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Institution: | National University of Singapore |
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