Characterization of a silicon nanowire-based cantilever air-flow sensor

10.1088/0960-1317/22/9/095008

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Bibliographic Details
Main Authors: Zhang, S., Lou, L., Park, W.-T., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82040
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Institution: National University of Singapore