Characterization of a silicon nanowire-based cantilever air-flow sensor
10.1088/0960-1317/22/9/095008
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Main Authors: | Zhang, S., Lou, L., Park, W.-T., Lee, C. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/82040 |
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Institution: | National University of Singapore |
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