Characterization of a silicon nanowire-based cantilever air-flow sensor
10.1088/0960-1317/22/9/095008
Saved in:
Main Authors: | , , , |
---|---|
Other Authors: | |
Format: | Article |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/82040 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
id |
sg-nus-scholar.10635-82040 |
---|---|
record_format |
dspace |
spelling |
sg-nus-scholar.10635-820402024-11-09T07:59:45Z Characterization of a silicon nanowire-based cantilever air-flow sensor Zhang, S. Lou, L. Park, W.-T. Lee, C. ELECTRICAL & COMPUTER ENGINEERING 10.1088/0960-1317/22/9/095008 Journal of Micromechanics and Microengineering 22 9 - JMMIE 2014-10-07T04:24:41Z 2014-10-07T04:24:41Z 2012-09 Article Zhang, S., Lou, L., Park, W.-T., Lee, C. (2012-09). Characterization of a silicon nanowire-based cantilever air-flow sensor. Journal of Micromechanics and Microengineering 22 (9) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/22/9/095008 09601317 http://scholarbank.nus.edu.sg/handle/10635/82040 000308210600018 Scopus |
institution |
National University of Singapore |
building |
NUS Library |
continent |
Asia |
country |
Singapore Singapore |
content_provider |
NUS Library |
collection |
ScholarBank@NUS |
description |
10.1088/0960-1317/22/9/095008 |
author2 |
ELECTRICAL & COMPUTER ENGINEERING |
author_facet |
ELECTRICAL & COMPUTER ENGINEERING Zhang, S. Lou, L. Park, W.-T. Lee, C. |
format |
Article |
author |
Zhang, S. Lou, L. Park, W.-T. Lee, C. |
spellingShingle |
Zhang, S. Lou, L. Park, W.-T. Lee, C. Characterization of a silicon nanowire-based cantilever air-flow sensor |
author_sort |
Zhang, S. |
title |
Characterization of a silicon nanowire-based cantilever air-flow sensor |
title_short |
Characterization of a silicon nanowire-based cantilever air-flow sensor |
title_full |
Characterization of a silicon nanowire-based cantilever air-flow sensor |
title_fullStr |
Characterization of a silicon nanowire-based cantilever air-flow sensor |
title_full_unstemmed |
Characterization of a silicon nanowire-based cantilever air-flow sensor |
title_sort |
characterization of a silicon nanowire-based cantilever air-flow sensor |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/82040 |
_version_ |
1821181939637288960 |