Characterization of a silicon nanowire-based cantilever air-flow sensor

10.1088/0960-1317/22/9/095008

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Main Authors: Zhang, S., Lou, L., Park, W.-T., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82040
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-820402024-11-09T07:59:45Z Characterization of a silicon nanowire-based cantilever air-flow sensor Zhang, S. Lou, L. Park, W.-T. Lee, C. ELECTRICAL & COMPUTER ENGINEERING 10.1088/0960-1317/22/9/095008 Journal of Micromechanics and Microengineering 22 9 - JMMIE 2014-10-07T04:24:41Z 2014-10-07T04:24:41Z 2012-09 Article Zhang, S., Lou, L., Park, W.-T., Lee, C. (2012-09). Characterization of a silicon nanowire-based cantilever air-flow sensor. Journal of Micromechanics and Microengineering 22 (9) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/22/9/095008 09601317 http://scholarbank.nus.edu.sg/handle/10635/82040 000308210600018 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1088/0960-1317/22/9/095008
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Zhang, S.
Lou, L.
Park, W.-T.
Lee, C.
format Article
author Zhang, S.
Lou, L.
Park, W.-T.
Lee, C.
spellingShingle Zhang, S.
Lou, L.
Park, W.-T.
Lee, C.
Characterization of a silicon nanowire-based cantilever air-flow sensor
author_sort Zhang, S.
title Characterization of a silicon nanowire-based cantilever air-flow sensor
title_short Characterization of a silicon nanowire-based cantilever air-flow sensor
title_full Characterization of a silicon nanowire-based cantilever air-flow sensor
title_fullStr Characterization of a silicon nanowire-based cantilever air-flow sensor
title_full_unstemmed Characterization of a silicon nanowire-based cantilever air-flow sensor
title_sort characterization of a silicon nanowire-based cantilever air-flow sensor
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/82040
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