Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor

10.1063/1.3675878

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Bibliographic Details
Main Authors: Zhang, S., Lou, L., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/57067
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Institution: National University of Singapore