Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor

10.1063/1.3675878

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Bibliographic Details
Main Authors:	Zhang, S., Lou, L., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/57067
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Institution:	National University of Singapore

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Summary:	10.1063/1.3675878

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