Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor

10.1063/1.3675878

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Bibliographic Details
Main Authors: Zhang, S., Lou, L., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/57067
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-570672023-10-25T22:52:14Z Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor Zhang, S. Lou, L. Lee, C. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.3675878 Applied Physics Letters 100 2 - APPLA 2014-06-17T03:01:52Z 2014-06-17T03:01:52Z 2012-01-09 Article Zhang, S., Lou, L., Lee, C. (2012-01-09). Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor. Applied Physics Letters 100 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3675878 00036951 http://scholarbank.nus.edu.sg/handle/10635/57067 000299126800067 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1063/1.3675878
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Zhang, S.
Lou, L.
Lee, C.
format Article
author Zhang, S.
Lou, L.
Lee, C.
spellingShingle Zhang, S.
Lou, L.
Lee, C.
Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor
author_sort Zhang, S.
title Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor
title_short Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor
title_full Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor
title_fullStr Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor
title_full_unstemmed Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor
title_sort piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/57067
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