Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor
10.1063/1.3675878
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sg-nus-scholar.10635-570672023-10-25T22:52:14Z Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor Zhang, S. Lou, L. Lee, C. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.3675878 Applied Physics Letters 100 2 - APPLA 2014-06-17T03:01:52Z 2014-06-17T03:01:52Z 2012-01-09 Article Zhang, S., Lou, L., Lee, C. (2012-01-09). Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor. Applied Physics Letters 100 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3675878 00036951 http://scholarbank.nus.edu.sg/handle/10635/57067 000299126800067 Scopus |
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10.1063/1.3675878 |
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ELECTRICAL & COMPUTER ENGINEERING |
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ELECTRICAL & COMPUTER ENGINEERING Zhang, S. Lou, L. Lee, C. |
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Zhang, S. Lou, L. Lee, C. |
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Zhang, S. Lou, L. Lee, C. Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor |
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Zhang, S. |
title |
Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor |
title_short |
Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor |
title_full |
Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor |
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Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor |
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Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor |
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piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor |
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2014 |
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http://scholarbank.nus.edu.sg/handle/10635/57067 |
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