A heater plate assisted bake/chill system for photoresist processing in photolithography

10.1016/j.applthermaleng.2008.05.024

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Bibliographic Details
Main Authors:	Chua, H.T., Tay, A., Wang, Y., Wu, X.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Lithography Mica heater Temperature control Thermoelectric
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/54235
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-54235
record_format	dspace
spelling	sg-nus-scholar.10635-542352024-11-14T02:32:24Z A heater plate assisted bake/chill system for photoresist processing in photolithography Chua, H.T. Tay, A. Wang, Y. Wu, X. ELECTRICAL & COMPUTER ENGINEERING Lithography Mica heater Temperature control Thermoelectric 10.1016/j.applthermaleng.2008.05.024 Applied Thermal Engineering 29 5-6 985-997 ATENF 2014-06-16T09:28:59Z 2014-06-16T09:28:59Z 2009-04 Article Chua, H.T., Tay, A., Wang, Y., Wu, X. (2009-04). A heater plate assisted bake/chill system for photoresist processing in photolithography. Applied Thermal Engineering 29 (5-6) : 985-997. ScholarBank@NUS Repository. https://doi.org/10.1016/j.applthermaleng.2008.05.024 13594311 http://scholarbank.nus.edu.sg/handle/10635/54235 000263608900024 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Lithography Mica heater Temperature control Thermoelectric
spellingShingle	Lithography Mica heater Temperature control Thermoelectric Chua, H.T. Tay, A. Wang, Y. Wu, X. A heater plate assisted bake/chill system for photoresist processing in photolithography
description	10.1016/j.applthermaleng.2008.05.024
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Chua, H.T. Tay, A. Wang, Y. Wu, X.
format	Article
author	Chua, H.T. Tay, A. Wang, Y. Wu, X.
author_sort	Chua, H.T.
title	A heater plate assisted bake/chill system for photoresist processing in photolithography
title_short	A heater plate assisted bake/chill system for photoresist processing in photolithography
title_full	A heater plate assisted bake/chill system for photoresist processing in photolithography
title_fullStr	A heater plate assisted bake/chill system for photoresist processing in photolithography
title_full_unstemmed	A heater plate assisted bake/chill system for photoresist processing in photolithography
title_sort	heater plate assisted bake/chill system for photoresist processing in photolithography
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/54235
_version_	1821202957568311296

A heater plate assisted bake/chill system for photoresist processing in photolithography

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