A simple technology for superjunction device fabrication: Polyflanked VDMOSFET

10.1109/LED.2002.803770

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Bibliographic Details
Main Authors:	Gan, K.P., Yang, X., Liang, Y.C., Samudra, G.S., Yong, L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Power MOSFET Superjunction device
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/54810
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Institution:	National University of Singapore

Description
Summary:	10.1109/LED.2002.803770

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