A simple technology for superjunction device fabrication: Polyflanked VDMOSFET

10.1109/LED.2002.803770

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Bibliographic Details
Main Authors:	Gan, K.P., Yang, X., Liang, Y.C., Samudra, G.S., Yong, L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Power MOSFET Superjunction device
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/54810
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-54810
record_format	dspace
spelling	sg-nus-scholar.10635-548102023-10-26T21:40:17Z A simple technology for superjunction device fabrication: Polyflanked VDMOSFET Gan, K.P. Yang, X. Liang, Y.C. Samudra, G.S. Yong, L. ELECTRICAL & COMPUTER ENGINEERING Power MOSFET Superjunction device 10.1109/LED.2002.803770 IEEE Electron Device Letters 23 10 627-629 EDLED 2014-06-17T02:35:47Z 2014-06-17T02:35:47Z 2002-10 Article Gan, K.P., Yang, X., Liang, Y.C., Samudra, G.S., Yong, L. (2002-10). A simple technology for superjunction device fabrication: Polyflanked VDMOSFET. IEEE Electron Device Letters 23 (10) : 627-629. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2002.803770 07413106 http://scholarbank.nus.edu.sg/handle/10635/54810 000178497900019 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Power MOSFET Superjunction device
spellingShingle	Power MOSFET Superjunction device Gan, K.P. Yang, X. Liang, Y.C. Samudra, G.S. Yong, L. A simple technology for superjunction device fabrication: Polyflanked VDMOSFET
description	10.1109/LED.2002.803770
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Gan, K.P. Yang, X. Liang, Y.C. Samudra, G.S. Yong, L.
format	Article
author	Gan, K.P. Yang, X. Liang, Y.C. Samudra, G.S. Yong, L.
author_sort	Gan, K.P.
title	A simple technology for superjunction device fabrication: Polyflanked VDMOSFET
title_short	A simple technology for superjunction device fabrication: Polyflanked VDMOSFET
title_full	A simple technology for superjunction device fabrication: Polyflanked VDMOSFET
title_fullStr	A simple technology for superjunction device fabrication: Polyflanked VDMOSFET
title_full_unstemmed	A simple technology for superjunction device fabrication: Polyflanked VDMOSFET
title_sort	simple technology for superjunction device fabrication: polyflanked vdmosfet
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/54810
_version_	1781412029058252800

A simple technology for superjunction device fabrication: Polyflanked VDMOSFET

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