Adaptive library-based device performance-driven optical proximity correction
10.1049/el.2010.2724
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2014
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sg-nus-scholar.10635-549012023-08-29T20:08:56Z Adaptive library-based device performance-driven optical proximity correction Teh, S.H. Heng, C.H. Tay, A. ELECTRICAL & COMPUTER ENGINEERING 10.1049/el.2010.2724 Electronics Letters 46 7 513-515 ELLEA 2014-06-17T02:36:48Z 2014-06-17T02:36:48Z 2010-04-01 Article Teh, S.H., Heng, C.H., Tay, A. (2010-04-01). Adaptive library-based device performance-driven optical proximity correction. Electronics Letters 46 (7) : 513-515. ScholarBank@NUS Repository. https://doi.org/10.1049/el.2010.2724 00135194 http://scholarbank.nus.edu.sg/handle/10635/54901 000276383700029 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1049/el.2010.2724 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Teh, S.H. Heng, C.H. Tay, A. |
| format |
Article |
| author |
Teh, S.H. Heng, C.H. Tay, A. |
| spellingShingle |
Teh, S.H. Heng, C.H. Tay, A. Adaptive library-based device performance-driven optical proximity correction |
| author_sort |
Teh, S.H. |
| title |
Adaptive library-based device performance-driven optical proximity correction |
| title_short |
Adaptive library-based device performance-driven optical proximity correction |
| title_full |
Adaptive library-based device performance-driven optical proximity correction |
| title_fullStr |
Adaptive library-based device performance-driven optical proximity correction |
| title_full_unstemmed |
Adaptive library-based device performance-driven optical proximity correction |
| title_sort |
adaptive library-based device performance-driven optical proximity correction |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/54901 |
| _version_ |
1775626976355155968 |