Adaptive library-based device performance-driven optical proximity correction

10.1049/el.2010.2724

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Bibliographic Details
Main Authors: Teh, S.H., Heng, C.H., Tay, A.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/54901
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Institution: National University of Singapore
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