Adaptive library-based device performance-driven optical proximity correction
10.1049/el.2010.2724
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Main Authors: | Teh, S.H., Heng, C.H., Tay, A. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/54901 |
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Institution: | National University of Singapore |
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