Boron profile narrowing in laser-processed silicon after rapid thermal anneal

10.1149/1.1633764

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Bibliographic Details
Main Authors:	Poon, C.H., Tan, L.S., Cho, B.J., See, A., Bhat, M.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55221
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-55221
record_format	dspace
spelling	sg-nus-scholar.10635-552212023-10-26T08:33:06Z Boron profile narrowing in laser-processed silicon after rapid thermal anneal Poon, C.H. Tan, L.S. Cho, B.J. See, A. Bhat, M. ELECTRICAL & COMPUTER ENGINEERING 10.1149/1.1633764 Journal of the Electrochemical Society 151 1 G80-G83 JESOA 2014-06-17T02:40:35Z 2014-06-17T02:40:35Z 2004 Article Poon, C.H., Tan, L.S., Cho, B.J., See, A., Bhat, M. (2004). Boron profile narrowing in laser-processed silicon after rapid thermal anneal. Journal of the Electrochemical Society 151 (1) : G80-G83. ScholarBank@NUS Repository. https://doi.org/10.1149/1.1633764 00134651 http://scholarbank.nus.edu.sg/handle/10635/55221 000187428800067 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1149/1.1633764
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Poon, C.H. Tan, L.S. Cho, B.J. See, A. Bhat, M.
format	Article
author	Poon, C.H. Tan, L.S. Cho, B.J. See, A. Bhat, M.
spellingShingle	Poon, C.H. Tan, L.S. Cho, B.J. See, A. Bhat, M. Boron profile narrowing in laser-processed silicon after rapid thermal anneal
author_sort	Poon, C.H.
title	Boron profile narrowing in laser-processed silicon after rapid thermal anneal
title_short	Boron profile narrowing in laser-processed silicon after rapid thermal anneal
title_full	Boron profile narrowing in laser-processed silicon after rapid thermal anneal
title_fullStr	Boron profile narrowing in laser-processed silicon after rapid thermal anneal
title_full_unstemmed	Boron profile narrowing in laser-processed silicon after rapid thermal anneal
title_sort	boron profile narrowing in laser-processed silicon after rapid thermal anneal
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/55221
_version_	1781412091559673856

Boron profile narrowing in laser-processed silicon after rapid thermal anneal

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