Charge-based capacitance measurement technique for nanoscale devices: Accuracy assessment based on TCAD simulations

10.1109/TED.2009.2016396

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Main Authors: Zhao, H., Rustagi, S.C., Ma, F.-J., Samudra, G.S., Singh, N., Lo, G.Q., Kwong, D.-L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/55287
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-552872023-10-27T07:04:10Z Charge-based capacitance measurement technique for nanoscale devices: Accuracy assessment based on TCAD simulations Zhao, H. Rustagi, S.C. Ma, F.-J. Samudra, G.S. Singh, N. Lo, G.Q. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING Charge-based capacitance measurement (CBCM) technique Nanoscale devices Nanowire MOSFETs Sub-femtofarad capacitance measurements Transient TCAD simulations 10.1109/TED.2009.2016396 IEEE Transactions on Electron Devices 56 5 1157-1160 IETDA 2014-06-17T02:41:21Z 2014-06-17T02:41:21Z 2009 Article Zhao, H., Rustagi, S.C., Ma, F.-J., Samudra, G.S., Singh, N., Lo, G.Q., Kwong, D.-L. (2009). Charge-based capacitance measurement technique for nanoscale devices: Accuracy assessment based on TCAD simulations. IEEE Transactions on Electron Devices 56 (5) : 1157-1160. ScholarBank@NUS Repository. https://doi.org/10.1109/TED.2009.2016396 00189383 http://scholarbank.nus.edu.sg/handle/10635/55287 000265712400062 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Charge-based capacitance measurement (CBCM) technique
Nanoscale devices
Nanowire MOSFETs
Sub-femtofarad capacitance measurements
Transient TCAD simulations
spellingShingle Charge-based capacitance measurement (CBCM) technique
Nanoscale devices
Nanowire MOSFETs
Sub-femtofarad capacitance measurements
Transient TCAD simulations
Zhao, H.
Rustagi, S.C.
Ma, F.-J.
Samudra, G.S.
Singh, N.
Lo, G.Q.
Kwong, D.-L.
Charge-based capacitance measurement technique for nanoscale devices: Accuracy assessment based on TCAD simulations
description 10.1109/TED.2009.2016396
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Zhao, H.
Rustagi, S.C.
Ma, F.-J.
Samudra, G.S.
Singh, N.
Lo, G.Q.
Kwong, D.-L.
format Article
author Zhao, H.
Rustagi, S.C.
Ma, F.-J.
Samudra, G.S.
Singh, N.
Lo, G.Q.
Kwong, D.-L.
author_sort Zhao, H.
title Charge-based capacitance measurement technique for nanoscale devices: Accuracy assessment based on TCAD simulations
title_short Charge-based capacitance measurement technique for nanoscale devices: Accuracy assessment based on TCAD simulations
title_full Charge-based capacitance measurement technique for nanoscale devices: Accuracy assessment based on TCAD simulations
title_fullStr Charge-based capacitance measurement technique for nanoscale devices: Accuracy assessment based on TCAD simulations
title_full_unstemmed Charge-based capacitance measurement technique for nanoscale devices: Accuracy assessment based on TCAD simulations
title_sort charge-based capacitance measurement technique for nanoscale devices: accuracy assessment based on tcad simulations
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/55287
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