Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection
10.1023/A:1011336726819
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sg-nus-scholar.10635-553512024-11-13T21:15:31Z Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection Rau, E.I. Gostev, A.V. Shiqiu, Z. Phang, D. Chan, D. Thong, D. Wong, W. ELECTRICAL & COMPUTER ENGINEERING 10.1023/A:1011336726819 Russian Microelectronics 30 4 207-218 2014-06-17T02:42:06Z 2014-06-17T02:42:06Z 2001-07 Article Rau, E.I.,Gostev, A.V.,Shiqiu, Z.,Phang, D.,Chan, D.,Thong, D.,Wong, W. (2001-07). Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection. Russian Microelectronics 30 (4) : 207-218. ScholarBank@NUS Repository. <a href="https://doi.org/10.1023/A:1011336726819" target="_blank">https://doi.org/10.1023/A:1011336726819</a> 10637397 http://scholarbank.nus.edu.sg/handle/10635/55351 NOT_IN_WOS Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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| description |
10.1023/A:1011336726819 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
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ELECTRICAL & COMPUTER ENGINEERING Rau, E.I. Gostev, A.V. Shiqiu, Z. Phang, D. Chan, D. Thong, D. Wong, W. |
| format |
Article |
| author |
Rau, E.I. Gostev, A.V. Shiqiu, Z. Phang, D. Chan, D. Thong, D. Wong, W. |
| spellingShingle |
Rau, E.I. Gostev, A.V. Shiqiu, Z. Phang, D. Chan, D. Thong, D. Wong, W. Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection |
| author_sort |
Rau, E.I. |
| title |
Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection |
| title_short |
Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection |
| title_full |
Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection |
| title_fullStr |
Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection |
| title_full_unstemmed |
Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection |
| title_sort |
comparative analysis of scanning electron microscopy techniques for semiconductors: electron-beam-induced potential method, single-contact electron-beam-induced current method, and thermoacoustic detection |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/55351 |
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1821204553225207808 |