Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection

10.1023/A:1011336726819

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Bibliographic Details
Main Authors:	Rau, E.I., Gostev, A.V., Shiqiu, Z., Phang, D., Chan, D., Thong, D., Wong, W.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55351
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-55351
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spelling	sg-nus-scholar.10635-553512015-01-25T21:01:50Z Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection Rau, E.I. Gostev, A.V. Shiqiu, Z. Phang, D. Chan, D. Thong, D. Wong, W. ELECTRICAL & COMPUTER ENGINEERING 10.1023/A:1011336726819 Russian Microelectronics 30 4 207-218 2014-06-17T02:42:06Z 2014-06-17T02:42:06Z 2001-07 Article Rau, E.I.,Gostev, A.V.,Shiqiu, Z.,Phang, D.,Chan, D.,Thong, D.,Wong, W. (2001-07). Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection. Russian Microelectronics 30 (4) : 207-218. ScholarBank@NUS Repository. <a href="https://doi.org/10.1023/A:1011336726819" target="_blank">https://doi.org/10.1023/A:1011336726819</a> 10637397 http://scholarbank.nus.edu.sg/handle/10635/55351 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1023/A:1011336726819
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Rau, E.I. Gostev, A.V. Shiqiu, Z. Phang, D. Chan, D. Thong, D. Wong, W.
format	Article
author	Rau, E.I. Gostev, A.V. Shiqiu, Z. Phang, D. Chan, D. Thong, D. Wong, W.
spellingShingle	Rau, E.I. Gostev, A.V. Shiqiu, Z. Phang, D. Chan, D. Thong, D. Wong, W. Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection
author_sort	Rau, E.I.
title	Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection
title_short	Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection
title_full	Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection
title_fullStr	Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection
title_full_unstemmed	Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection
title_sort	comparative analysis of scanning electron microscopy techniques for semiconductors: electron-beam-induced potential method, single-contact electron-beam-induced current method, and thermoacoustic detection
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/55351
_version_	1681084483132981248

Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection

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