Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection

Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection

10.1023/A:1011336726819

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Bibliographic Details
Main Authors: Rau, E.I., Gostev, A.V., Shiqiu, Z., Phang, D., Chan, D., Thong, D., Wong, W.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55351
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/55351

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