Demonstration of secondary electron detection using monolithic multi-channel electron detector

Demonstration of secondary electron detection using monolithic multi-channel electron detector

10.1143/JJAP.47.4913

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Bibliographic Details
Main Authors: Tanimoto, S., Pickard, D.S., Kenney, C., Hast, J., Pease, R.F.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
DIFA
DiVa
Inspection
Lithography
Multi-channel detector
Multi-electron-beam system
Secondary electron detection
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55523
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Institution: National University of Singapore
id sg-nus-scholar.10635-55523
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spelling sg-nus-scholar.10635-555232023-10-26T07:13:59Z Demonstration of secondary electron detection using monolithic multi-channel electron detector Tanimoto, S. Pickard, D.S. Kenney, C. Hast, J. Pease, R.F. ELECTRICAL & COMPUTER ENGINEERING DIFA DiVa Inspection Lithography Multi-channel detector Multi-electron-beam system Secondary electron detection 10.1143/JJAP.47.4913 Japanese Journal of Applied Physics 47 6 PART 2 4913-4917 JAPND 2014-06-17T02:44:03Z 2014-06-17T02:44:03Z 2008-06-20 Article Tanimoto, S., Pickard, D.S., Kenney, C., Hast, J., Pease, R.F. (2008-06-20). Demonstration of secondary electron detection using monolithic multi-channel electron detector. Japanese Journal of Applied Physics 47 (6 PART 2) : 4913-4917. ScholarBank@NUS Repository. https://doi.org/10.1143/JJAP.47.4913 00214922 http://scholarbank.nus.edu.sg/handle/10635/55523 000257260500014 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic DIFA
DiVa
Inspection
Lithography
Multi-channel detector
Multi-electron-beam system
Secondary electron detection
spellingShingle DIFA
DiVa
Inspection
Lithography
Multi-channel detector
Multi-electron-beam system
Secondary electron detection
Tanimoto, S.
Pickard, D.S.
Kenney, C.
Hast, J.
Pease, R.F.
Demonstration of secondary electron detection using monolithic multi-channel electron detector
description 10.1143/JJAP.47.4913
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Tanimoto, S.
Pickard, D.S.
Kenney, C.
Hast, J.
Pease, R.F.
format Article
author Tanimoto, S.
Pickard, D.S.
Kenney, C.
Hast, J.
Pease, R.F.
author_sort Tanimoto, S.
title Demonstration of secondary electron detection using monolithic multi-channel electron detector
title_short Demonstration of secondary electron detection using monolithic multi-channel electron detector
title_full Demonstration of secondary electron detection using monolithic multi-channel electron detector
title_fullStr Demonstration of secondary electron detection using monolithic multi-channel electron detector
title_full_unstemmed Demonstration of secondary electron detection using monolithic multi-channel electron detector
title_sort demonstration of secondary electron detection using monolithic multi-channel electron detector
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/55523
_version_ 1781412143636152320

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