Demonstration of secondary electron detection using monolithic multi-channel electron detector

Demonstration of secondary electron detection using monolithic multi-channel electron detector

10.1143/JJAP.47.4913

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Bibliographic Details
Main Authors: Tanimoto, S., Pickard, D.S., Kenney, C., Hast, J., Pease, R.F.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
DIFA
DiVa
Inspection
Lithography
Multi-channel detector
Multi-electron-beam system
Secondary electron detection
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55523
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/55523

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