Demonstration of secondary electron detection using monolithic multi-channel electron detector

• Main Authors: Tanimoto, S., Pickard, D.S., Kenney, C., Hast, J., Pease, R.F.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: DIFA; DiVa; Inspection; Lithography; Multi-channel detector; Multi-electron-beam system; Secondary electron detection
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/55523
• Institution: National University of Singapore

10.1143/JJAP.47.4913