Dependence of leakage mechanisms on dielectric barrier in Cu-SiOC damascene interconnects

10.1063/1.1688978

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Main Authors:	Ngwan, V.C., Zhu, C., Krishnamoorthy, A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55525
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-55525
record_format	dspace
spelling	sg-nus-scholar.10635-555252023-10-26T20:51:00Z Dependence of leakage mechanisms on dielectric barrier in Cu-SiOC damascene interconnects Ngwan, V.C. Zhu, C. Krishnamoorthy, A. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.1688978 Applied Physics Letters 84 13 2316-2318 APPLA 2014-06-17T02:44:05Z 2014-06-17T02:44:05Z 2004-03-29 Article Ngwan, V.C., Zhu, C., Krishnamoorthy, A. (2004-03-29). Dependence of leakage mechanisms on dielectric barrier in Cu-SiOC damascene interconnects. Applied Physics Letters 84 (13) : 2316-2318. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1688978 00036951 http://scholarbank.nus.edu.sg/handle/10635/55525 000220591500032 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1688978
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Ngwan, V.C. Zhu, C. Krishnamoorthy, A.
format	Article
author	Ngwan, V.C. Zhu, C. Krishnamoorthy, A.
spellingShingle	Ngwan, V.C. Zhu, C. Krishnamoorthy, A. Dependence of leakage mechanisms on dielectric barrier in Cu-SiOC damascene interconnects
author_sort	Ngwan, V.C.
title	Dependence of leakage mechanisms on dielectric barrier in Cu-SiOC damascene interconnects
title_short	Dependence of leakage mechanisms on dielectric barrier in Cu-SiOC damascene interconnects
title_full	Dependence of leakage mechanisms on dielectric barrier in Cu-SiOC damascene interconnects
title_fullStr	Dependence of leakage mechanisms on dielectric barrier in Cu-SiOC damascene interconnects
title_full_unstemmed	Dependence of leakage mechanisms on dielectric barrier in Cu-SiOC damascene interconnects
title_sort	dependence of leakage mechanisms on dielectric barrier in cu-sioc damascene interconnects
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/55525
_version_	1781412144010493952

Dependence of leakage mechanisms on dielectric barrier in Cu-SiOC damascene interconnects

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